MEMS Relay

MEMS relays are defined as relays which are fabricated by micromachining processes and have mechanical contacts. Compared with electromechanical relays (EMR) and solid-state relays (SSR), MEMS relays are obviously small (typically 2mm by 2.5mm) and have the following advantages.


Compared to EMR a MEMS relay offers
Small size and/or low profile
Low power consumption
Mechanical reliability
Integration capability
Compared to SSR a MEMS relay offers
High frequency characteristics
Low contact resistance

The main drawbacks are low voltage/current switching capability and low breakdown voltage, however there exist many application fields, such as ATE(Automatic Testing Equipment)and Telecom.

Typical switching times are <0.3msec

If you have any questions or want further information,

please contact Professor R.B.Yates at R.Yates@mems.org.uk

©2002 R.B.Yates All rights reserved.